Failure Analysis & Trouble Shooting
- Frequently, the failure of a chamber is a complex series of events with symptoms on one or multiple chamber components.
- It is critical to identify the true root cause and bottleneck in such a set of failed components.
- We can assist in
- identifying the root cause
- understanding the sequence of parameters affecting the failure
- develop approaches to control and improve those parameters
- Ultimately: we can improve yield
- We apply a range of mechanical, chemical and processing engineering expertise, diagnostic technologies and analytical capabilities to solve the problem.
